Application

18680896 · USING SPECTROSCOPIC MEASUREMENTS FOR SUBSTRATE TEMPERATURE MONITORING

Filed 2024-05-31 · Granted · Patent 12249525 (2025-03-11) The official file ↗The patent and its PDF ↗ · Art unit 2899 · Examiner Marvin Payen Easy · CPC H10P 74/203 · Applied Materials, Inc. · AMAT / Kilpatrick Townsend & Stockton LLP

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

7.4 mo

to disposition 9.3 mo

Statutes raised

0 actions read

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