Application
18690661 · ELECTRON BEAM AND DROPLET-BASED EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
Filed 2024-10-02 · Pending The official file ↗ · Art unit 2881 · Examiner Robert H Kim Hard · CPC H05G 2/0035 · Worldbeam Solution Co., Ltd. · HSML P.C.
Office actions
0
first was Notice of allowance
RCEs
1
no appeal
To first action
22.0 mo
to disposition n/a
Statutes raised
·
0 actions read