Application

18714547 · OVERLAY METROLOGY BASED ON TEMPLATE MATCHING WITH ADAPTIVE WEIGHTING

Filed 2024-05-29 · Granted The official file ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/706835 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman LLP(ASML)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

17.2 mo

to disposition 25.6 mo

Statutes raised

102 103

1 actions read

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