PATLY.AIApplication
18722750 · A METHOD AND APPARATUS FOR IMPROVING THE UNIFORMITY OF EXPOSURE OF A PERIODIC PATTERN
Filed 2024-06-21 · Granted The official file ↗ · Art unit 2882 · Examiner Mesfin T Asfaw Typical · CPC G03F 7/70325 · EULITHA A.G. · LERNER GREENBERG STEMER LLP
Office actions
2
first was Non-final rejection
RCEs
1
no appeal
To first action
18.5 mo
to disposition 26.6 mo
Statutes raised
102
2 actions read