Application

18749170 · EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF

Filed 2024-06-20 · Granted · Patent 12366797 (2025-07-22) The official file ↗The patent and its PDF ↗ · Art unit 1737 · Examiner Mark F Huff Hard · CPC G03F 1/24 · Taiwan Semiconductor Manufacturing Company, Ltd. · Studebaker Brackett PLLC

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

8.5 mo

to disposition 13.0 mo

Statutes raised

0 actions read

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