Application

18750960 · SYSTEMS FOR REAL-TIME PULSE MEASUREMENT AND PULSE TIMING ADJUSTMENT TO CONTROL PLASMA PROCESS PERFORMANCE

Filed 2024-06-21 · Pending The official file ↗ · Art unit 1716 · Examiner Keath T Chen Typical · CPC H01J 37/32146 · Tokyo Electron Limited · TEL-Egan, Enders & Huston LLP.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

26.9 mo

to disposition n/a

Statutes raised

103 112

1 actions read

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