Application

18770574 · SYSTEMS AND METHODS FOR IN-SITU MARANGONI CLEANING

Filed 2024-07-11 · Granted · Patent 12482675 (2025-11-25) The official file ↗The patent and its PDF ↗ · Art unit 1718 · Examiner Marc Lorenzi Hard · CPC H10P 72/0416 · Taiwan Semiconductor Manufacturing Co., Ltd. · Maschoff Brennan

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

6.1 mo

to disposition 16.5 mo

Statutes raised

112 DP

1 actions read

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