Application

18770918 · METHOD AND A DEVICE FOR DETECTING CRYSTALLINE DEFECTS IN A SUBSTRATE BY DARK FIELD AND PHOTOLUMINESCENCE

Filed 2024-07-12 · Granted · Patent 12196681 (2025-01-14) The official file ↗The patent and its PDF ↗ · Art unit 2884 · Examiner Fani Polyzos Boosalis Easy · CPC G01N 21/6489 · UNITY SEMICONDUCTOR · GREER, BURNS & CRAIN, LTD

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

1.6 mo

to disposition 6.1 mo

Statutes raised

112

1 actions read

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