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18795411 · METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INVESTIGATION DEVICE TO PERFORM SUCH METHOD

Filed 2024-08-06 · Pending The official file ↗ · Art unit 2881 · Examiner Robert H Kim Hard · CPC G01N 23/2251 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
22.1 mo
to disposition n/a
Statutes raised
102 103
1 actions read
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