Application
18803314 · METHOD OF DETERMINING ABERRATIONS OF A CHARGED PARTICLE BEAM, METHOD OF DETERMINING CD INFORMATION, CORRESPONDING GENERATION OF COMPUTATIONAL MODELS, AND CORRESPONDING SYSTEMS
Filed 2024-08-13 · Pending The official file ↗ · Art unit 2881 · Examiner Jing Wang Easy · CPC G06N 20/00 · ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · AMAT / Kilpatrick Townsend & Stockton LLP
Office actions
1
first was Restriction requirement
RCEs
0
no appeal
To first action
21.0 mo
to disposition n/a
Statutes raised
102 103
1 actions read