Application

18808844 · Metrology Apparatus And Method For Determining A Characteristic Of One Or More Structures On A Substrate

Filed 2024-08-19 · Pending The official file ↗ · Art unit 2422 · Examiner Mikhail Itskovich Hard · CPC G03F 7/70616 · ASML Netherlands B. V. · Finnegan/ASML

Office actions

first was Non-final rejection

RCEs

appealed

To first action

13.3 mo

to disposition n/a

Statutes raised

3 actions read

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