Application

18815445 · SYSTEMS AND METHODS FOR REMOVING COLLATERAL DEPOSITIONS FROM WITHIN CHAMBER ARRANGEMENTS IN SEMICONDUCTOR PROCESSING SYSTEMS

Filed 2024-08-26 · Granted The official file ↗ · Art unit 1718 · Examiner Kelly M Gambetta Typical · CPC H10P 72/0402 · ASM IP Holding B.V. · BANNER & WITCOFF, LTD.

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

13.1 mo

to disposition 22.7 mo

Statutes raised

102 103 112

2 actions read

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