Application

18816114 · SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING DEVICE

Filed 2024-08-27 · Pending The official file ↗ · Art unit 1713 · Examiner Duy Vu Nguyen Deo Typical · CPC H10P 50/266 · Tokyo Electron Limited · IPUSA, P.L.L.C

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

22.7 mo

to disposition n/a

Statutes raised

102 103 112

1 actions read

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