PATLY.AIApplication
18816836 · PROCESS CONTROL FOR DOSE, FOCUS, AND OVERLAY USING WEIGHTING MAPS BASED ON SPATIAL PROCESS KEY PROCESS INDICATORS
Filed 2024-08-27 · Granted The official file ↗ · Art unit 2851 · Examiner Nghia M Doan Typical · CPC G03F 7/70633 · KLA Corporation · Suiter Swantz/KLA Joint Customer Number
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
17.8 mo
to disposition 24.6 mo
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