Application
18820061 · REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND MANUFACTURING METHOD THEREFOR
Filed 2024-08-29 · Granted · Patent 12228853 (2025-02-18) The official file ↗The patent and its PDF ↗ · Art unit 1737 · Examiner Christopher G Young Easy · CPC G03F 1/24 · AGC Inc. · FOLEY & LARDNER LLP
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