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18820386 · INTERFEROMETRIC METHOD FOR MEASURING OPTICAL DISTANCE

Filed 2024-08-30 · Granted · Patent 12584726 (2026-03-24) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Md M Rahman Easy · CPC G01B 9/02015 · Zygo Corporation · FISH & RICHARDSON P.C. (BO)

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to disposition 18.8 mo
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