PATLY.AIApplication
18829095 · UNIFORM PIXELATED MICROWAVE PLASMA SOURCE WITH SUBSTRATE ROTATION
Filed 2024-09-09 · Pending The official file ↗ · Art unit 1718 · Examiner Yuechuan Yu Easy · CPC H01J 37/32201 · Applied Materials, Inc. · Schwabe, Williamson & Wyatt/AMAT
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