Application
18835299 · SYSTEMS AND METHODS FOR REDUCING REFLECTED POWER ASSOCIATED WITH AN HF RF GENERATOR EFFICIENTLY
Filed 2024-08-01 · Granted · Patent 12640346 (2026-05-26) The official file ↗The patent and its PDF ↗ · Art unit 2845 · Examiner Srinivas Sathiraju Typical · CPC H01J 37/32174 · Lam Research Corporation · Polygon IP, LLP / Lam Research
Office actions
0
first was Notice of allowance
RCEs
0
no appeal
To first action
17.7 mo
to disposition 21.8 mo
Statutes raised
·
0 actions read