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18835299 · SYSTEMS AND METHODS FOR REDUCING REFLECTED POWER ASSOCIATED WITH AN HF RF GENERATOR EFFICIENTLY

Filed 2024-08-01 · Granted · Patent 12640346 (2026-05-26) The official file ↗The patent and its PDF ↗ · Art unit 2845 · Examiner Srinivas Sathiraju Typical · CPC H01J 37/32174 · Lam Research Corporation · Polygon IP, LLP / Lam Research

Office actions
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first was Notice of allowance
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To first action
17.7 mo
to disposition 21.8 mo
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