Application

18845733 · SIDEWALL PASSIVATION USING ALDEHYDE OR ISOCYANATE CHEMISTRY FOR HIGH ASPECT RATIO ETCH

Filed 2024-09-10 · Pending The official file ↗ · Art unit 1717 · Examiner Andrew J Bowman Typical · CPC H10P 50/283 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

21.0 mo

to disposition n/a

Statutes raised

102 103

1 actions read

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