PATLY.AIApplication
18858737 · STOCHASTIC-AWARE SOURCE MASK OPTIMIZATION BASED ON EDGE PLACEMENT PROBABILITY DISTRIBUTION
Filed 2024-10-21 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC G03F 7/70283 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman LLP(ASML)
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