PATLY.AIApplication
18865955 · MULTICHANNEL ALIGNMENT APPARATUS FOR LITHOGRAPHIC SYSTEMS
Filed 2024-11-14 · Pending The official file ↗ · Art unit 2877 · Examiner Hwa S Lee Hard · CPC G03F 7/706851 · ASML Netherlands B.V. · ASML Other DMIPG
Office actions
2
first was Non-final rejection
RCEs
0
no appeal
To first action
17.7 mo
to disposition n/a
Statutes raised
103
1 actions read