Application
18866057 · IN SITU TREATMENT OF MOLYBDENUM OXYHALIDE BYPRODUCTS IN SEMICONDUCTOR PROCESSING EQUIPMENT
Filed 2024-11-14 · Pending The official file ↗ · Art unit 2812 · Examiner Tien Tran Typical · CPC C23C 16/045 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL
Office actions
0
first was
RCEs
0
no appeal
To first action
n/a
to disposition n/a
Statutes raised
·
0 actions read