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18866057 · IN SITU TREATMENT OF MOLYBDENUM OXYHALIDE BYPRODUCTS IN SEMICONDUCTOR PROCESSING EQUIPMENT

Filed 2024-11-14 · Pending The official file ↗ · Art unit 2812 · Examiner Tien Tran Typical · CPC C23C 16/045 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL

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