PATLY.AIApplication
18874471 · HOLOGRAPHIC METROLOGY APPARATUS AND METHOD
Filed 2024-12-12 · Granted The official file ↗ · Art unit 2877 · Examiner Maurice C Smith Typical · CPC G03F 7/706847 · ASML Netherlands B.V. · Finnegan/ASML
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
16.8 mo
to disposition 21.6 mo
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