PATLY.AIApplication
18875090 · DEPOSITION AND ETCH OF SILICON-CONTAINING LAYER
Filed 2024-12-13 · Pending The official file ↗ · Art unit 6212 · Examiner Benjamin L Utech · CPC H10P 14/6532 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL
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