PATLY.AIApplication
18885038 · SCANNING ELECTRON MICROSCOPIC DIRECT-WRITE LITHOGRAPHY SYSTEM BASED ON A COMPLIANT NANO SERVO MOTION SYSTEM
Filed 2024-09-13 · Pending The official file ↗ · Art unit 2100 · Examiner John R Cottingham Easy · Tsinghua University · DINSMORE & SHOHL LLP
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first was Non-final rejection
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To first action
1.3 mo
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