Application

18887325 · SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SEPARATION METHOD, AND ARTICLE MANUFACTURING METHOD

Filed 2024-09-17 · Granted · Patent 12710700 (2026-08-18) The official file ↗The patent and its PDF ↗ · Art unit 1759 · Examiner Steven H Whitesell Typical · CPC H10P 72/78 · CANON KABUSHIKI KAISHA · Rossi, Kimms & McDowell LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

14.8 mo

to disposition 23.0 mo

Statutes raised

102 103

1 actions read

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