PATLY.AIApplication
18889130 · Method for Forming a Self-aligned Buried Power Rail in a Nanosheet-based Transistor Device
Filed 2024-09-18 · Pending The official file ↗ · Art unit 2813 · Examiner Edward Rhett Cheek Typical · CPC H10D 64/017 · Imec vzw · MCDONNELL BOEHNEN HULBERT & BERGHOFF LLP
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