Application

18906920 · ARRANGEMENT, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATING FACET MIRRORS

Filed 2024-10-04 · Granted The official file ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/70075 · Carl Zeiss SMT GmbH · EDELL, SHAPIRO & FINNAN, LLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

16.9 mo

to disposition 22.7 mo

Statutes raised

101 103 112

1 actions read

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