Application

18909820 · ULTRA-HIGH SENSITIVITY HYBRID INSPECTION WITH FULL WAFER COVERAGE CAPABILITY

Filed 2024-10-08 · Pending The official file ↗ · Art unit 2881 · Examiner Alina Rose Kaliszewski Typical · CPC H01J 37/07 · KLA Corporation · Kwan & Olynick LLP -- KLA

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

21.7 mo

to disposition n/a

Statutes raised

102 103 112

1 actions read

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