PATLY.AIApplication
18911171 · Substrate Processing Apparatus
Filed 2024-10-09 · Pending The official file ↗ · Art unit 1794 · Examiner Michael A Band Hard · CPC H01J 37/3441 · Tokyo Electron Limited · Tokyo Electron Limited/Fenwick
Office actions
2
first was Non-final rejection
RCEs
1
no appeal
To first action
9.9 mo
to disposition n/a
Statutes raised
102 103 112
2 actions read