Application

18921861 · PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Filed 2024-10-21 · Pending The official file ↗ · Art unit 1718 · Examiner Yuechuan Yu Easy · CPC H01J 37/32522 · Hitachi High-Tech Corporation · MILES & STOCKBRIDGE PC

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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