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18939988 · Method for Integration of Tantalum Nitride Resistive Heater for Photonics Devices and Related Structure

Filed 2024-11-07 · Pending The official file ↗ · Art unit 2893 · Examiner Vongsavanh Sengdara Hard · CPC H10D 1/474 · Newport Fab, LLC dba Tower Semiconductor Newport Beach · FARJAMI & FARJAMI LLP

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