Application

18946058 · PLASMA PROCESSING BASED ON BIAS SUPPLY REPORTING

Filed 2024-11-13 · Granted · Patent 12700578 (2026-08-04) The official file ↗The patent and its PDF ↗ · Art unit 2836 · Examiner Kenneth B Wells Typical · CPC H01J 37/32128 · Advanced Energy Industries, Inc. · NOD Law PC/Advanced Energy

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

14.5 mo

to disposition 20.7 mo

Statutes raised

102 103 112

1 actions read

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