Application

18948593 · APPARATUS AND TUNING METHOD FOR MITIGATING RF LOAD IMPEDANCE VARIATIONS DUE TO PERIODIC DISTURBANCES

Filed 2024-11-15 · Granted · Patent 12700573 (2026-08-04) The official file ↗The patent and its PDF ↗ · Art unit 2845 · Examiner Henry T Luong Typical · CPC H01J 37/32155 · MKS Instruments, Inc. · MKS Inc.

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

16.7 mo

to disposition 20.6 mo

Statutes raised

0 actions read

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