Application

18968641 · CVD BORON UNIFORMITY OVERCOMING LOADING EFFECTS

Filed 2024-12-04 · Granted · Patent 12484316 (2025-11-25) The official file ↗The patent and its PDF ↗ · Art unit 2896 · Examiner Matthew L Reames Typical · CPC H10F 30/29 · KLA Corporation · Suiter Swantz/KLA Joint Customer Number

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

8.3 mo

to disposition 11.7 mo

Statutes raised

0 actions read

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