Application

18969230 · HEAT SHIELD MEMBER AND SUBSTRATE PROCESSING APPARATUS

Filed 2024-12-04 · Pending The official file ↗ · Art unit 1716 · Examiner Ram N Kackar Typical · CPC C23C 16/4585 · TOKYO ELECTRON LIMITED · JOSHUA GOLDBERG

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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