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18977908 · SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Filed 2024-12-11 · Pending The official file ↗ · Art unit 6212 · Examiner Benjamin L Utech · CPC H10P 50/642 · SCREEN Holdings Co., Ltd. · OSTROLENK FABER LLP

Office actions
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first was Restriction requirement
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no appeal
To first action
19.5 mo
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