Application
18980692 · METHODS AND SYSTEMS FOR FORMING A LAYER COMPRISING SILICON AND COMPOSITION AND SYNTHESIS OF SILICON PRECURSOR
Filed 2024-12-13 · Granted The official file ↗ · Art unit 1623 · Examiner Pancham Bakshi Easy · CPC C07F 9/06 · ASM IP Holding B.V. · BANNER & WITCOFF, LTD.
Office actions
3
first was Restriction requirement
RCEs
1
no appeal
To first action
2.2 mo
to disposition 19.4 mo
Statutes raised
102 112
3 actions read