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18984294 · SELECTIVE DEPOSITION FOR MITIGATING CORNER LOSS IN SEMICONDUCTOR FABRICATION

Filed 2024-12-17 · Pending The official file ↗ · Art unit 2899 · Examiner Abbigale A Boyle Hard · CPC H10P 50/283 · Tokyo Electron Limited · Stanek Lemon Crouse and Meeks, PA

Office actions
1
first was Restriction requirement
RCEs
0
no appeal
To first action
2.2 mo
to disposition n/a
Statutes raised
103 112
1 actions read
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