Application
18987533 · Upwardly-oriented beamline implanter architecture for contactless backside substrate processing
Filed 2024-12-19 · Pending The official file ↗ · Art unit 2881 · Examiner Christopher J Gassen Typical · CPC H01J 37/20 · Applied Materials, Inc. · Nields, Lemack & Frame, LLC - Varian
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
21.4 mo
to disposition n/a
Statutes raised
102 103
1 actions read