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Application

19005324 · METHOD FOR GENERATING WRITING DATA, WRITING DATA GENERATION APPARATUS, METHOD OF CHARGED-PARTICLE BEAM WRITING, CHARGED-PARTICLE BEAM WRITING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM

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Filed 2024-12-30 · Pending The official file ↗ · Art unit 2881 · Examiner Larry Li Typical · CPC H01J 37/3026 · NuFlare Technology, Inc. · OBLON, MCCLELLAND, MAIER & NEUSTADT, L.L.P.

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