Application

19008824 · METHOD FOR PRODUCING A MAIN BODY OF AN OPTICAL ELEMENT FOR SEMICONDUCTOR LITHOGRAPHY, MAIN BODY, OPTICAL ELEMENT AND PROJECTION EXPOSURE APPARATUS

Filed 2025-01-03 · Pending The official file ↗ · Art unit 1742 · Examiner Xue H Liu Typical · CPC B29C 64/153 · Carl Zeiss SMT GmbH · EDELL, SHAPIRO & FINNAN, LLC

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

15.4 mo

to disposition n/a

Statutes raised

0 actions read

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