Application

19028608 · WAFER MEASUREMENT SYSTEM USING TIME-OF-FLIGHT MEDIUM-ENERGY ION SCATTERING SIGNAL

Filed 2025-01-17 · Granted · Patent 12429440 (2025-09-30) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Andrew P Smyth Hard · CPC G01N 23/20008 · K-MAC TECHNOLOGY CORP. · Muncy, Geissler, Olds & Lowe, P.C.

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

4.0 mo

to disposition 8.4 mo

Statutes raised

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