PATLY.AIApplication
19056734 · System and Method for Delivering Pulsed RF Power from a Single Generator to Distributed Plasma Sources of a Semiconductor Process System
Filed 2025-02-19 · Granted The official file ↗ · Art unit 2845 · Examiner Minh Tran Typical · CPC H01J 37/3211 · Yang Pan
Office actions
0
first was Notice of allowance
RCEs
0
no appeal
To first action
15.6 mo
to disposition 15.6 mo
Statutes raised
·
0 actions read