PATLY.AIApplication
19056816 · SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Filed 2025-02-19 · Pending The official file ↗ · Art unit 1716 · Examiner Tiffany Z Nuckols Hard · CPC H10P 70/20 · Tokyo Electron Limited · Patent Docket Department
Office actions
1
first was Restriction requirement
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0
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To first action
15.2 mo
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