Application

19063189 · LEARNING CONTROL SYSTEM AND METHOD FOR ULTRA-PRECISION LITHOGRAPHIC APPARATUS BASED ON UNCERTAINTY COMPENSATION

Filed 2025-02-25 · Granted · Patent 12386267 (2025-08-12) The official file ↗The patent and its PDF ↗ · Art unit 2116 · Examiner Yuhui R Pan Typical · CPC G03F 7/70491 · Harbin Institute of Technology · True Shepherd LLC (W)

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

1.4 mo

to disposition 5.5 mo

Statutes raised

0 actions read

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