PATLY.AIApplication
19063918 · LOW-TEMPERATURE VAPORIZER FOR ION IMPLANTER WITH IN-VACUUM CONTROLLED FLOW
Filed 2025-02-26 · Abandoned The official file ↗ · Art unit 1716 · Examiner Keath T Chen Typical · CPC C23C 14/48 · Axcelis Technologies, Inc. · Eschweiler & Potashnik, LLC (Axcelis)
Office actions
2
first was Non-final rejection
RCEs
0
no appeal
To first action
3.1 mo
to disposition 14.0 mo
Statutes raised
103
1 actions read