Patent AnalyticsExaminers
Menu

Application

19074598 · ETCHING METHOD AND PLASMA PROCESSING APPARATUS

Filed 2025-03-10 · Pending The official file ↗ · Art unit 1716 · Examiner Roberts P Culbert Easy · CPC H10P 50/283 · Tokyo Electron Limited · Xsensus

Office actions
0
first was
RCEs
0
no appeal
To first action
n/a
to disposition n/a
Statutes raised
·
0 actions read
Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.

See plans Sign in