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Application

19074849 · ARRANGEMENT, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATING FACET MIRRORS

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Filed 2025-03-10 · Granted The official file ↗ · Art unit 2882 · Examiner Deoram Persaud Typical · CPC G03F 7/706845 · Carl Zeiss SMT GmbH · EDELL, SHAPIRO & FINNAN, LLC

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first was Notice of allowance
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To first action
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to disposition 18.7 mo
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