Application

19082746 · SUBSTRATE PROCESSING APPARATUS, NOZZLE, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

Filed 2025-03-18 · Pending The official file ↗ · Art unit 1716 · Examiner Margaret D Klunk Hard · CPC C23C 16/455 · KOKUSAI ELECTRIC CORPORATION · VOLPE KOENIG

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

12.0 mo

to disposition n/a

Statutes raised

102 103

1 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.